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  1. 1
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    Advanced Etch Technology for Nanopatterning IX

    Other Authors: “…Wise, Rich…”
    Full text available on Research4Life (SPIE Digital Library)
    Electronic eBook

  2. 2
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    Advanced Etch Technology for Nanopatterning VIII

    Other Authors: “…Wise, Rich…”
    Full text available on Research4Life (SPIE Digital Library)
    Electronic eBook

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