Jaeger, R. C. (1988). Introduction to microelectronic fabrication. Addison-Wesley.
Dyfyniad Arddull ChicagoJaeger, Richard C. Introduction to Microelectronic Fabrication. New York: Addison-Wesley, 1988.
Dyfyniad MLAJaeger, Richard C. Introduction to Microelectronic Fabrication. Addison-Wesley, 1988.
Rhybudd: Mae'n bosib nad yw'r dyfyniadau hyn bob amser yn 100% cywir.