APA (7th ed.) Citation

Jaeger, R. C. (1988). Introduction to microelectronic fabrication. Addison-Wesley.

Chicago Style (17th ed.) Citation

Jaeger, Richard C. Introduction to Microelectronic Fabrication. New York: Addison-Wesley, 1988.

MLA (9th ed.) Citation

Jaeger, Richard C. Introduction to Microelectronic Fabrication. Addison-Wesley, 1988.