Jaeger, R. C. (1988). Introduction to microelectronic fabrication. Addison-Wesley.
Chicago-čujuhus (17. p.)Jaeger, Richard C. Introduction to Microelectronic Fabrication. New York: Addison-Wesley, 1988.
MLA-čujuhus (9. p.)Jaeger, Richard C. Introduction to Microelectronic Fabrication. Addison-Wesley, 1988.
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