Journal of Microlithography, Microfabrication, and Microsystems. Cambridge University Press.
Dyfyniad Arddull ChicagoJournal of Microlithography, Microfabrication, and Microsystems. Cambridge University Press.
Dyfyniad MLAJournal of Microlithography, Microfabrication, and Microsystems. Cambridge University Press.
Rhybudd: Mae'n bosib nad yw'r dyfyniadau hyn bob amser yn 100% cywir.