Journal of Microlithography, Microfabrication, and Microsystems. Cambridge University Press.
Chicago Style (17th ed.) CitationJournal of Microlithography, Microfabrication, and Microsystems. Cambridge University Press.
MLA (9th ed.) CitationJournal of Microlithography, Microfabrication, and Microsystems. Cambridge University Press.
Warning: These citations may not always be 100% accurate.