Monahan, K. Integrated Circuit Metrology, Inspection, and Process Control III. SPIE Digital Library.
Cita Chicago (17th ed.)Monahan, Kevin. Integrated Circuit Metrology, Inspection, and Process Control III. SPIE Digital Library.
Cita MLA (9th ed.)Monahan, Kevin. Integrated Circuit Metrology, Inspection, and Process Control III. SPIE Digital Library.
Atenció: Aquestes cites poden no estar 100% correctes.