APA (7th ed.) Citation

Lin, B. Optical/Laser Microlithography II. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Lin, Burn. Optical/Laser Microlithography II. SPIE Digital Library.

MLA (9th ed.) Citation

Lin, Burn. Optical/Laser Microlithography II. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.