Lacombat, M. Optical Microlithography and Metrology for Microcircuit Fabrication. SPIE Digital Library.
Čikaški stil citiranja (17. izdanje)Lacombat, Michel. Optical Microlithography and Metrology for Microcircuit Fabrication. SPIE Digital Library.
MLA način citiranja (9. izdanje)Lacombat, Michel. Optical Microlithography and Metrology for Microcircuit Fabrication. SPIE Digital Library.
Upozorenje: Ovi citati možda nisu uvijek 100% točni.