Lacombat, M. Optical Microlithography and Metrology for Microcircuit Fabrication. SPIE Digital Library.
Cita Chicago (17th ed.)Lacombat, Michel. Optical Microlithography and Metrology for Microcircuit Fabrication. SPIE Digital Library.
Cita MLA (9th ed.)Lacombat, Michel. Optical Microlithography and Metrology for Microcircuit Fabrication. SPIE Digital Library.
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