Resnick, D. Electron-Beam, X-Ray, and Ion-Beam Technology: Submicrometer Lithographies IX. SPIE Digital Library.
Chicago Style (17. basım) AtıfResnick, Douglas. Electron-Beam, X-Ray, and Ion-Beam Technology: Submicrometer Lithographies IX. SPIE Digital Library.
MLA (9th ed.) AtıfResnick, Douglas. Electron-Beam, X-Ray, and Ion-Beam Technology: Submicrometer Lithographies IX. SPIE Digital Library.
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