Wiley, J. 10th Annual Symp on Microlithography. SPIE Digital Library.
Cita Chicago (17th ed.)Wiley, Jim. 10th Annual Symp on Microlithography. SPIE Digital Library.
Cita MLA (9th ed.)Wiley, Jim. 10th Annual Symp on Microlithography. SPIE Digital Library.
Atenció: Aquestes cites poden no estar 100% correctes.