Citace podle APA (7th ed.)

Peckerar, M. Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing II. SPIE Digital Library.

Citace podle Chicago (17th ed.)

Peckerar, Martin. Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing II. SPIE Digital Library.

Citace podle MLA (9th ed.)

Peckerar, Martin. Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing II. SPIE Digital Library.

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