Peckerar, M. Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing II. SPIE Digital Library.
Chicago (17e ed.) BronvermeldingPeckerar, Martin. Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing II. SPIE Digital Library.
MLA (9e ed.) BronvermeldingPeckerar, Martin. Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing II. SPIE Digital Library.
Let op: Deze citaties zijn niet altijd 100% accuraat.