Peckerar, M. Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing II. SPIE Digital Library.
Chicago Style (17. basım) AtıfPeckerar, Martin. Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing II. SPIE Digital Library.
MLA (9th ed.) AtıfPeckerar, Martin. Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing II. SPIE Digital Library.
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