APA (7th ed.) Citation

Postek, M. Integrated Circuit Metrology, Inspection, and Process Control VI. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Postek, Michael. Integrated Circuit Metrology, Inspection, and Process Control VI. SPIE Digital Library.

MLA (9th ed.) Citation

Postek, Michael. Integrated Circuit Metrology, Inspection, and Process Control VI. SPIE Digital Library.

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