Postek, M. Integrated Circuit Metrology, Inspection, and Process Control VI. SPIE Digital Library.
Chicago Style (17. basım) AtıfPostek, Michael. Integrated Circuit Metrology, Inspection, and Process Control VI. SPIE Digital Library.
MLA (9th ed.) AtıfPostek, Michael. Integrated Circuit Metrology, Inspection, and Process Control VI. SPIE Digital Library.
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