Patterson, D. Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing III. SPIE Digital Library.
Citace podle Chicago (17th ed.)Patterson, David. Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing III. SPIE Digital Library.
Citace podle MLA (9th ed.)Patterson, David. Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing III. SPIE Digital Library.
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