Patterson, D. Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing III. SPIE Digital Library.
Chicago-viite (17. p.)Patterson, David. Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing III. SPIE Digital Library.
MLA-viite (9. p.)Patterson, David. Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing III. SPIE Digital Library.
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