Patterson, D. Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing III. SPIE Digital Library.
Citazione stile Chigago Style (17a edizione)Patterson, David. Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing III. SPIE Digital Library.
Citatione MLA (9a ed.)Patterson, David. Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing III. SPIE Digital Library.
Attenzione: Queste citazioni potrebbero non essere precise al 100%.