Postek, M. Integrated Circuit Metrology, Inspection, and Process Control VII. SPIE Digital Library.
Lua i Stíl Chicago (17ú heag.)Postek, Michael. Integrated Circuit Metrology, Inspection, and Process Control VII. SPIE Digital Library.
Lua MLA (9ú heag.)Postek, Michael. Integrated Circuit Metrology, Inspection, and Process Control VII. SPIE Digital Library.
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