Patterson, D. Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing IV. SPIE Digital Library.
Dyfyniad Arddull ChicagoPatterson, David. Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing IV. SPIE Digital Library.
Dyfyniad MLAPatterson, David. Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing IV. SPIE Digital Library.
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