Brunner, T. Optical/Laser Microlithography VII. SPIE Digital Library.
Cita Chicago (17th ed.)Brunner, Timothy. Optical/Laser Microlithography VII. SPIE Digital Library.
Cita MLA (9th ed.)Brunner, Timothy. Optical/Laser Microlithography VII. SPIE Digital Library.
Atenció: Aquestes cites poden no estar 100% correctes.