Karthe, W. Nanofabrication Technologies and Device Integration. SPIE Digital Library.
Cita Chicago (17th ed.)Karthe, Wolfgang. Nanofabrication Technologies and Device Integration. SPIE Digital Library.
Cita MLA (9th ed.)Karthe, Wolfgang. Nanofabrication Technologies and Device Integration. SPIE Digital Library.
Atenció: Aquestes cites poden no estar 100% correctes.