Chen, F. Microelectronics Technology and Process Integration. SPIE Digital Library.
Cita Chicago (17th ed.)Chen, Fusen. Microelectronics Technology and Process Integration. SPIE Digital Library.
Cita MLA (9th ed.)Chen, Fusen. Microelectronics Technology and Process Integration. SPIE Digital Library.
Atenció: Aquestes cites poden no estar 100% correctes.