APA (7th ed.) Zitazioa

Chen, F. Microelectronics Technology and Process Integration. SPIE Digital Library.

Chicago Style (17th ed.) Zitazioa

Chen, Fusen. Microelectronics Technology and Process Integration. SPIE Digital Library.

MLA (9th ed.) Zitazioa

Chen, Fusen. Microelectronics Technology and Process Integration. SPIE Digital Library.

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