Chen, F. Microelectronics Technology and Process Integration. SPIE Digital Library.
Chicago (17e ed.) BronvermeldingChen, Fusen. Microelectronics Technology and Process Integration. SPIE Digital Library.
MLA (9e ed.) BronvermeldingChen, Fusen. Microelectronics Technology and Process Integration. SPIE Digital Library.
Let op: Deze citaties zijn niet altijd 100% accuraat.