Warlaumont, J. Electron-Beam, X-Ray, EUV, and Ion-Beam Submicrometer Lithographies for Manufacturing V. SPIE Digital Library.
Cita Chicago (17th ed.)Warlaumont, John. Electron-Beam, X-Ray, EUV, and Ion-Beam Submicrometer Lithographies for Manufacturing V. SPIE Digital Library.
Cita MLA (9th ed.)Warlaumont, John. Electron-Beam, X-Ray, EUV, and Ion-Beam Submicrometer Lithographies for Manufacturing V. SPIE Digital Library.
Atenció: Aquestes cites poden no estar 100% correctes.