Hoy Bennett, M. Integrated Circuit Metrology, Inspection, and Process Control IX. SPIE Digital Library.
Cita Chicago (17th ed.)Hoy Bennett, Marylyn. Integrated Circuit Metrology, Inspection, and Process Control IX. SPIE Digital Library.
Cita MLA (9th ed.)Hoy Bennett, Marylyn. Integrated Circuit Metrology, Inspection, and Process Control IX. SPIE Digital Library.
Atenció: Aquestes cites poden no estar 100% correctes.