APA (7th ed.) Citation

Hoy Bennett, M. Integrated Circuit Metrology, Inspection, and Process Control IX. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Hoy Bennett, Marylyn. Integrated Circuit Metrology, Inspection, and Process Control IX. SPIE Digital Library.

MLA (9th ed.) Citation

Hoy Bennett, Marylyn. Integrated Circuit Metrology, Inspection, and Process Control IX. SPIE Digital Library.

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