Hoy Bennett, M. Integrated Circuit Metrology, Inspection, and Process Control IX. SPIE Digital Library.
Chicago-viite (17. p.)Hoy Bennett, Marylyn. Integrated Circuit Metrology, Inspection, and Process Control IX. SPIE Digital Library.
MLA-viite (9. p.)Hoy Bennett, Marylyn. Integrated Circuit Metrology, Inspection, and Process Control IX. SPIE Digital Library.
Varoitus: Nämä viitteet eivät aina ole täysin luotettavia.