APA (7th ed.) Citation

Chen, I. Microelectronic Device and Multilevel Interconnection Technology. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Chen, Ih-Chin. Microelectronic Device and Multilevel Interconnection Technology. SPIE Digital Library.

MLA (9th ed.) Citation

Chen, Ih-Chin. Microelectronic Device and Multilevel Interconnection Technology. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.