Sabnis, A. Process, Equipment, and Materials Control in Integrated Circuit Manufacturing. SPIE Digital Library.
Chicago (17e ed.) BronvermeldingSabnis, Anant. Process, Equipment, and Materials Control in Integrated Circuit Manufacturing. SPIE Digital Library.
MLA (9e ed.) BronvermeldingSabnis, Anant. Process, Equipment, and Materials Control in Integrated Circuit Manufacturing. SPIE Digital Library.
Let op: Deze citaties zijn niet altijd 100% accuraat.