APA (7th ed.) Citation

Postek, M. Microlithography and Metrology in Micromachining. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Postek, Michael. Microlithography and Metrology in Micromachining. SPIE Digital Library.

MLA (9th ed.) Citation

Postek, Michael. Microlithography and Metrology in Micromachining. SPIE Digital Library.

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