APA (7th ed.) Zitazioa

Postek, M. Microlithography and Metrology in Micromachining. SPIE Digital Library.

Chicago Style (17th ed.) Zitazioa

Postek, Michael. Microlithography and Metrology in Micromachining. SPIE Digital Library.

MLA (9th ed.) Zitazioa

Postek, Michael. Microlithography and Metrology in Micromachining. SPIE Digital Library.

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