Postek, M. Microlithography and Metrology in Micromachining. SPIE Digital Library.
Citación estilo ChicagoPostek, Michael. Microlithography and Metrology in Micromachining. SPIE Digital Library.
Cita MLAPostek, Michael. Microlithography and Metrology in Micromachining. SPIE Digital Library.
Warning: These citations may not always be 100% accurate.