Postek, M. Microlithography and Metrology in Micromachining. SPIE Digital Library.
Tohutoru Kātū Chicago (17th ed.)Postek, Michael. Microlithography and Metrology in Micromachining. SPIE Digital Library.
Tohutoro MLA (9th ed.)Postek, Michael. Microlithography and Metrology in Micromachining. SPIE Digital Library.
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