Postek, M. Microlithography and Metrology in Micromachining. SPIE Digital Library.
Chicago (17e ed.) BronvermeldingPostek, Michael. Microlithography and Metrology in Micromachining. SPIE Digital Library.
MLA (9e ed.) BronvermeldingPostek, Michael. Microlithography and Metrology in Micromachining. SPIE Digital Library.
Let op: Deze citaties zijn niet altijd 100% accuraat.