Postek, M. Microlithography and Metrology in Micromachining. SPIE Digital Library.
Chicago Style (17. basım) AtıfPostek, Michael. Microlithography and Metrology in Micromachining. SPIE Digital Library.
MLA (9th ed.) AtıfPostek, Michael. Microlithography and Metrology in Micromachining. SPIE Digital Library.
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