Cita APA (7th ed.)

Seeger, D. Electron-Beam, X-Ray, EUV, and Ion-Beam Submicrometer Lithographies for Manufacturing VI. SPIE Digital Library.

Cita Chicago (17th ed.)

Seeger, David. Electron-Beam, X-Ray, EUV, and Ion-Beam Submicrometer Lithographies for Manufacturing VI. SPIE Digital Library.

Cita MLA (9th ed.)

Seeger, David. Electron-Beam, X-Ray, EUV, and Ion-Beam Submicrometer Lithographies for Manufacturing VI. SPIE Digital Library.