APA (7th ed.) Zitazioa

Jones, S. Metrology, Inspection, and Process Control for Microlithography X. SPIE Digital Library.

Chicago Style (17th ed.) Zitazioa

Jones, Susan. Metrology, Inspection, and Process Control for Microlithography X. SPIE Digital Library.

MLA (9th ed.) Zitazioa

Jones, Susan. Metrology, Inspection, and Process Control for Microlithography X. SPIE Digital Library.

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