Jones, S. Metrology, Inspection, and Process Control for Microlithography X. SPIE Digital Library.
Citación estilo ChicagoJones, Susan. Metrology, Inspection, and Process Control for Microlithography X. SPIE Digital Library.
Cita MLAJones, Susan. Metrology, Inspection, and Process Control for Microlithography X. SPIE Digital Library.
Warning: These citations may not always be 100% accurate.