Jones, S. Metrology, Inspection, and Process Control for Microlithography X. SPIE Digital Library.
Tohutoru Kātū Chicago (17th ed.)Jones, Susan. Metrology, Inspection, and Process Control for Microlithography X. SPIE Digital Library.
Tohutoro MLA (9th ed.)Jones, Susan. Metrology, Inspection, and Process Control for Microlithography X. SPIE Digital Library.
Kia tūpato: Kāore pea ēnei kupu hautoa i te ōrite pū 100%.