Jones, S. Metrology, Inspection, and Process Control for Microlithography X. SPIE Digital Library.
Chicago Style (17. basım) AtıfJones, Susan. Metrology, Inspection, and Process Control for Microlithography X. SPIE Digital Library.
MLA (9th ed.) AtıfJones, Susan. Metrology, Inspection, and Process Control for Microlithography X. SPIE Digital Library.
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