Yoshioka, N. Photomask Japan 2015: Photomask and Next-Generation Lithography Mask Technology XXII. SPIE Digital Library.
Cita Chicago (17th ed.)Yoshioka, Nobuyuki. Photomask Japan 2015: Photomask and Next-Generation Lithography Mask Technology XXII. SPIE Digital Library.
Cita MLA (9th ed.)Yoshioka, Nobuyuki. Photomask Japan 2015: Photomask and Next-Generation Lithography Mask Technology XXII. SPIE Digital Library.
Atenció: Aquestes cites poden no estar 100% correctes.