Behringer, U. 31st European Mask and Lithography Conference. SPIE Digital Library.
Tohutoru Kātū Chicago (17th ed.)Behringer, Uwe. 31st European Mask and Lithography Conference. SPIE Digital Library.
Tohutoro MLA (9th ed.)Behringer, Uwe. 31st European Mask and Lithography Conference. SPIE Digital Library.
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