Behringer, U. 31st European Mask and Lithography Conference. SPIE Digital Library.
Chicago Style (17. basım) AtıfBehringer, Uwe. 31st European Mask and Lithography Conference. SPIE Digital Library.
MLA (9th ed.) AtıfBehringer, Uwe. 31st European Mask and Lithography Conference. SPIE Digital Library.
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