37th European Mask and Lithography Conference

Bibliográfalaš dieđut
Eará dahkkit: Behringer, Uwe
Materiálatiipa: Elektrovnnalaš E-girji
Giella:eaŋgalasgiella
Almmustuhtton: SPIE Digital Library, 1/1/22
Fáttát:
Liŋkkat:Full text available on Research4Life (SPIE Digital Library)
Govvádus
Fuomášahttimat:<strong>On-Campus Access Only (IP based access)</strong>
Olgguldas hápmi:1 online resource
Materiálatiipa:Mode of access: Internet
ISBN:9781510660496
9781510660502
Beassan:Electronic access restricted to authorized AUW faculty, staff and students