APA (7th ed.) Citation

Lio, A. Optical and EUV Nanolithography XXXVI. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Lio, Anna. Optical and EUV Nanolithography XXXVI. SPIE Digital Library.

MLA (9th ed.) Citation

Lio, Anna. Optical and EUV Nanolithography XXXVI. SPIE Digital Library.

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