Mohanty, N. Advanced Etch Technology and Process Integration for Nanopatterning XII. SPIE Digital Library.
Citazione stile Chigago Style (17a edizione)Mohanty, Nihar. Advanced Etch Technology and Process Integration for Nanopatterning XII. SPIE Digital Library.
Citatione MLA (9a ed.)Mohanty, Nihar. Advanced Etch Technology and Process Integration for Nanopatterning XII. SPIE Digital Library.
Attenzione: Queste citazioni potrebbero non essere precise al 100%.